The variations in slurry chemistry parameters including pH, concentrations of complexing and corrosion inhibiting agents, and slurry flow rates as well as average MRR in Cu-CMP process are modeled using features from two vibration sensors (one wired and the other wireless accelerometer). The study is perhaps one of the first efforts to use wireless vibration sensors for real-time monitoring of MRR and the chief slurry chemistry parameters in CMP. We hope that this work will lead to the advent of physics-based process-machine interaction (PMI) models that can be used to delineate the various process behaviors, which in turn can be used to select vibration signal features that are more sensitive to variations in MRR and other quality and performance variable of the CMP process. The study has delineated the joint (i.e., statistical interaction) effects of various slurry components on MRR in Cu-CMP. In specific, the joint effects of the complexing agent with other input parameters, such as pH and flow rate (i.e., two-way interactions) on MRR have been found to be significant.
Yakumo is an exploration of the different technologies used in making a modern game, including graphics, physics simulation, 3D audio and content creation pipeline design. This book follows the processes involved in implementing a game which integrates all of these components, based on using OGRE 3D for graphics and Havok Physics for real-time physics simulation. This book also tackles common issues with such software, such as creating a camera that does not clip through surfaces, writing multithreaded code, and supporting reliable network communication. Implementation of an I/O library for iPhone OS devices is also described. This allows physical input to the game by taking advantage of the many sensors of the iPhone/iPod touch, including accelerometer and touch-screen input. In 2009 this book won the IBM Open Source Competition award (University of Limerick, Ireland). All technology produced during this project is released as open source software under the Apache License, Version 2.0 and is available online at http://daniel.ie/