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Design of a Monolithic 3DOF MEMS Capacitive Acc...
48,99 € *
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Design of a Monolithic 3DOF MEMS Capacitive Accelerometer ab 48.99 € als Taschenbuch: Utilizing Surface Micromachining Technology Using PolyMUMPS Process. Aus dem Bereich: Bücher, Wissenschaft, Technik,

Anbieter: hugendubel
Stand: 27.09.2020
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High-sensitivity, Low-noise Multi-axis Capaciti...
68,00 € *
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High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively.

Anbieter: Dodax
Stand: 27.09.2020
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Design of a Monolithic 3DOF MEMS Capacitive Acc...
49,00 € *
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Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mm×3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g).

Anbieter: Dodax
Stand: 27.09.2020
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Design of a Monolithic 3DOF MEMS Capacitive Acc...
79,90 CHF *
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Utilizing Surface Micromachining Technology Using PolyMUMPS Process

Anbieter: Orell Fuessli CH
Stand: 27.09.2020
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Design of a Monolithic 3DOF MEMS Capacitive Acc...
43,99 € *
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Utilizing Surface Micromachining Technology Using PolyMUMPS Process

Anbieter: Thalia AT
Stand: 27.09.2020
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