Design and Optimization of a MEMS-Based Piezoresistive Accelerometer ab 79.9 € als Taschenbuch: Computational Analysis of a MEMS-Based Accelerometer with Silicon Nanowire Piezoresistors for Head Injuries Monitoring. Aus dem Bereich: Bücher, Wissenschaft, Technik,
Design and Optimization of a MEMS-Based Piezoresistive Accelerometer ab 79.9 EURO Computational Analysis of a MEMS-Based Accelerometer with Silicon Nanowire Piezoresistors for Head Injuries Monitoring
This work focuses on the design improvement of a tri-axial piezoresistive accelerometer specifically designed for head injuries monitoring where medium-G impacts are common, for example in sports such as motorsport and American football. Given the particular biomedical and biomechanical application the device requires the highest sensitivity achievable with a single proof mass approach, where basically all three axes of measurements are detected with a single mass suspended by surrounding beams. Moreover, a very low error, below 1%, is expected for these type of applications where accuracy is paramount. The optimization method used is based on the progressive increment of the sensor mass moment of inertia (MMI) in all axes. The theoretical hypothesis to confirm is that an increment of MMI of the device proof mass would determine an increment of device sensitivity with a simultaneous reduction of cross-talk in the particular axis under study. The work numerically demonstrates the hypothesis validity by simulating the optimized device mechanical structures with Finite Element Method. A final optimal shape is selected as the best possible output of the optimization process.
Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mm×3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g).
The Micro-electro-mechanical system is the latest upcoming technology for the sensors integrating with the conventional microelectronics components and devices. The Complementary Metal Oxide Semiconductor is fabricated with latest lithography and other fabrication techniques. This research studied the accelerometer at micro level and its functionality. The Micro-electro-mechanical system based accelerometer exhaustive study carried, from the Capacitive type is taken into consideration. The capacitive type accelerometer is redesign and its behavioral model is designed using Complementary Metal Oxide Semiconductor. The various study is carried out on that model like noise and power is calculated. The Proposed model is capacitor base and CMOS in which it is sensing circuit and comparator circuit is infused together, the output is calculated with the two voltages which shows the upward and downward motions of accelerometer. The MEMS CMOS Model is designed using Electronics Design and Automation and Spice Netlist is generated which can be used and interfaced with the other futurist models.
This book presented a hierarchical MEMS design synthesis and optimization process developed for a specific structure of accelerometer. The design synthesis methodology exploits the fast and accurate simulation of the SUGAR tool (based on modified modal analysis) along with the full simulation capability of ANSYS (based on the finite element method). During the course of design, the modified nodal analysis and the finite element methods were combined in optimizing the sensor structure. After fabrication process, the utilizing of Allan variance method is also very useful to determine errors caused by both of the intrinsic sensor s noises and interface circuit s. Another important contribution of this book is that comprehensive analysis considering the impact of many parameters, such as the doping concentration, temperature, noises, and power consumption on optimization of the sensitivity and resolution has been proposed in order to enhance sensitivity and resolution of the accelerometer.
In this practical reference, popular author Lewin Edwards shows how to develop robust, dependable real-time systems for robotics and other control applications, using open-source tools. It demonstrates efficient and low-cost embedded hardware and software design techniques, based on Linux as the development platform and operating system and the Atmel AVR as the primary microcontroller. The book provides comprehensive examples of sensor, actuator and control applications and circuits, along with source code for a number of projects. It walks the reader through the process of setting up the Linux-based controller, from creating a custom kernel to customizing the BIOS, to implementing graphical control interfaces. Including detailed design information on: ESBUS PC-host interface Host-module communications protocol A speed-controlled DC motor with tach feedback and thermal cut-off A stepper motor controller A two-axis attitude sensor using a MEMS accelerometer Infrared remote control in Linux using LIRC Machine vision using Video4Linux The Accompanying CD-ROM contains a wealth of design materials, including: Full schematics and source code for the projects described Ready-made disk images for the miniature Linux distribution uses as the basis for the PC-side software Distribution archives of source code for all GNU software used, along with application-specific patches where appropriate A free version of the schematic capture and PCB CAD software used Atmel AVR Studio * The first-ever book on using open source technology for robotics design! * Immensely valuable source code and design tools provided on the CD-ROM * Covers hot topicssuch as GPS navigation, 3-D sensing, and machine vision, all using a Linux platform!