Design and Fabrication of a 3-DOF Piezoresistive Micro Accelerometer ab 59 € als Taschenbuch: A Completed Work from Design Simulation Fabrication to Performance Analysis. Aus dem Bereich: Bücher, Wissenschaft, Technik,
Design and Fabrication of a 3-DOF Piezoresistive Micro Accelerometer ab 59 EURO A Completed Work from Design Simulation Fabrication to Performance Analysis
Strong dependence of surface plasmon resonance (SPR) on coupling parameters offers new varieties of sensing mechanisms in nano and micro-scale engineering fields. In this study, design, fabrication and characterization of MEMS displacement sensors that utilize angular dependence of grating coupled SPR condition are explored. Several surface plasmon polariton (SPP) excitation mechanisms are reported in the academic literature. One of them which is quite adaptable to microelectromechanical systems is grating coupling scheme. In this scheme, thin metallized grating structures are particularly designed depending on the desired wavelength and the angle of incidence of the SPP excitation light. Various lithographic techniques (nanoimprint, electron beam and optical lithography) are used to nanofabricate those certainly defined gratings. MEMS displacement sensor designs relying on the principle of angular displacement detection scheme are developed. In addition, a MEMS accelerometer design with plasmonic readout with nano-G noise floor is presented. Novel arrayed sensors combining the sensitivities of plasmon resonance and micromembrane type sensors may provide unprecedented performance.
High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively.
The Micro-electro-mechanical system is the latest upcoming technology for the sensors integrating with the conventional microelectronics components and devices. The Complementary Metal Oxide Semiconductor is fabricated with latest lithography and other fabrication techniques. This research studied the accelerometer at micro level and its functionality. The Micro-electro-mechanical system based accelerometer exhaustive study carried, from the Capacitive type is taken into consideration. The capacitive type accelerometer is redesign and its behavioral model is designed using Complementary Metal Oxide Semiconductor. The various study is carried out on that model like noise and power is calculated. The Proposed model is capacitor base and CMOS in which it is sensing circuit and comparator circuit is infused together, the output is calculated with the two voltages which shows the upward and downward motions of accelerometer. The MEMS CMOS Model is designed using Electronics Design and Automation and Spice Netlist is generated which can be used and interfaced with the other futurist models.
This book presented a hierarchical MEMS design synthesis and optimization process developed for a specific structure of accelerometer. The design synthesis methodology exploits the fast and accurate simulation of the SUGAR tool (based on modified modal analysis) along with the full simulation capability of ANSYS (based on the finite element method). During the course of design, the modified nodal analysis and the finite element methods were combined in optimizing the sensor structure. After fabrication process, the utilizing of Allan variance method is also very useful to determine errors caused by both of the intrinsic sensor s noises and interface circuit s. Another important contribution of this book is that comprehensive analysis considering the impact of many parameters, such as the doping concentration, temperature, noises, and power consumption on optimization of the sensitivity and resolution has been proposed in order to enhance sensitivity and resolution of the accelerometer.