High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively.
The Micro-electro-mechanical system is the latest upcoming technology for the sensors integrating with the conventional microelectronics components and devices. The Complementary Metal Oxide Semiconductor is fabricated with latest lithography and other fabrication techniques. This research studied the accelerometer at micro level and its functionality. The Micro-electro-mechanical system based accelerometer exhaustive study carried, from the Capacitive type is taken into consideration. The capacitive type accelerometer is redesign and its behavioral model is designed using Complementary Metal Oxide Semiconductor. The various study is carried out on that model like noise and power is calculated. The Proposed model is capacitor base and CMOS in which it is sensing circuit and comparator circuit is infused together, the output is calculated with the two voltages which shows the upward and downward motions of accelerometer. The MEMS CMOS Model is designed using Electronics Design and Automation and Spice Netlist is generated which can be used and interfaced with the other futurist models.