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Design of a Monolithic 3DOF MEMS Capacitive Acc...
49,00 € *
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Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mm×3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g).

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Stand: 27.01.2020
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Tran Duc, Tan: Modeling and simulation of the c...
16,99 € *
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Erscheinungsdatum: 21.01.2009, Medium: Taschenbuch, Einband: Kartoniert / Broschiert, Titel: Modeling and simulation of the capacitive accelerometer, Auflage: 1. Auflage von 1990 // 1. Auflage, Autor: Tran Duc, Tan, Verlag: GRIN Publishing, Sprache: Englisch, Rubrik: Elektronik // Elektrotechnik, Nachrichtentechnik, Seiten: 84, Gewicht: 133 gr, Verkäufer: averdo

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Stand: 27.01.2020
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Khan, Muhammad Shuja: Design of a Monolithic 3D...
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Erscheinungsdatum: 07/2011, Medium: Taschenbuch, Einband: Kartoniert / Broschiert, Titel: Design of a Monolithic 3DOF MEMS Capacitive Accelerometer, Titelzusatz: Utilizing Surface Micromachining Technology Using PolyMUMPS Process, Autor: Khan, Muhammad Shuja, Verlag: LAP Lambert Acad. Publ., Sprache: Englisch, Rubrik: Elektronik // Elektrotechnik, Nachrichtentechnik, Seiten: 92, Informationen: Paperback, Gewicht: 153 gr, Verkäufer: averdo

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Stand: 27.01.2020
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High-sensitivity, Low-noise Multi-axis Capaciti...
68,00 € *
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High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively.

Anbieter: Dodax
Stand: 27.01.2020
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High-sensitivity, Low-noise Multi-axis Capaciti...
70,00 € *
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High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows 3pF/g sensitivity and sub- g/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6 g/rtHz and 1.1 g/rtHz for in-plane and out-of- plane devices, respectively.

Anbieter: Dodax AT
Stand: 27.01.2020
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MEMS Accelerometer Modelling and Noise Analysis
59,00 € *
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Micro Electro Mechanical Systems (MEMS) have an extensive use in different areas of technology. Inertial sensors (accelerometers and gyroscopes) are one of the most widely used devices fabricated using MEMS technology. MEMS accelerometers play an important role in different application areas such as automotive, inertial navigation, guidance, industry, space applications etc. because of low cost, small size, low power, and high reliability. This book presents a detailed SIMULINK model for a conventional capacitive sigma-delta accelerometer system consisting of a MEMS accelerometer, closed-loop readout electronics, and signal processing units (e.g. decimation filters). By using this model, it is possible to estimate the performance of the full accelerometer system including individual noise components, operation range, open loop sensitivity, scale factor, etc. The developed model has been verified through test results using a capacitive MEMS accelerometer, full-custom designed readout electronics, and signal processing unit implemented on a FPGA.

Anbieter: Dodax
Stand: 27.01.2020
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MEMS Accelerometer Modelling and Noise Analysis
60,70 € *
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Micro Electro Mechanical Systems (MEMS) have an extensive use in different areas of technology. Inertial sensors (accelerometers and gyroscopes) are one of the most widely used devices fabricated using MEMS technology. MEMS accelerometers play an important role in different application areas such as automotive, inertial navigation, guidance, industry, space applications etc. because of low cost, small size, low power, and high reliability. This book presents a detailed SIMULINK model for a conventional capacitive sigma-delta accelerometer system consisting of a MEMS accelerometer, closed-loop readout electronics, and signal processing units (e.g. decimation filters). By using this model, it is possible to estimate the performance of the full accelerometer system including individual noise components, operation range, open loop sensitivity, scale factor, etc. The developed model has been verified through test results using a capacitive MEMS accelerometer, full-custom designed readout electronics, and signal processing unit implemented on a FPGA.

Anbieter: Dodax AT
Stand: 27.01.2020
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CMOS Based Behavioral Model of MEMS Accelerometer
39,90 € *
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The Micro-electro-mechanical system is the latest upcoming technology for the sensors integrating with the conventional microelectronics components and devices. The Complementary Metal Oxide Semiconductor is fabricated with latest lithography and other fabrication techniques. This research studied the accelerometer at micro level and its functionality. The Micro-electro-mechanical system based accelerometer exhaustive study carried, from the Capacitive type is taken into consideration. The capacitive type accelerometer is redesign and its behavioral model is designed using Complementary Metal Oxide Semiconductor. The various study is carried out on that model like noise and power is calculated. The Proposed model is capacitor base and CMOS in which it is sensing circuit and comparator circuit is infused together, the output is calculated with the two voltages which shows the upward and downward motions of accelerometer. The MEMS CMOS Model is designed using Electronics Design and Automation and Spice Netlist is generated which can be used and interfaced with the other futurist models.

Anbieter: Dodax
Stand: 27.01.2020
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CMOS Based Behavioral Model of MEMS Accelerometer
41,10 € *
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The Micro-electro-mechanical system is the latest upcoming technology for the sensors integrating with the conventional microelectronics components and devices. The Complementary Metal Oxide Semiconductor is fabricated with latest lithography and other fabrication techniques. This research studied the accelerometer at micro level and its functionality. The Micro-electro-mechanical system based accelerometer exhaustive study carried, from the Capacitive type is taken into consideration. The capacitive type accelerometer is redesign and its behavioral model is designed using Complementary Metal Oxide Semiconductor. The various study is carried out on that model like noise and power is calculated. The Proposed model is capacitor base and CMOS in which it is sensing circuit and comparator circuit is infused together, the output is calculated with the two voltages which shows the upward and downward motions of accelerometer. The MEMS CMOS Model is designed using Electronics Design and Automation and Spice Netlist is generated which can be used and interfaced with the other futurist models.

Anbieter: Dodax AT
Stand: 27.01.2020
Zum Angebot